1400°C CVD Tube Furnace with Gas Mixing & Pumping System


Product total
Options total
Grand total
SKU: TF1400cvd Categories: ,



TF1400 series Chemical Vapor Deposition (CVD) tube furnaces feature a chamber with Mitsubishi (Japan) high quality alumina fiber insulation and SiC heating elements. A dual-wall steel internal housing helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results. All our furnaces are CE compliant.


  • Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
  • Dual flanges support ensures better sealing and longer tube life.
  • Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.
  • Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)
  • Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
  • Built-in computer interface.
  • Long life type S thermocouple.


  • Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
  • Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.


 Tube Material High purity (99%) Al2O3 alumina
 Min/max./Constant Working Temperature Ambient / 1400°C (2552°F) / 1300°C (2372°F)
 Refractory Lining Mitsubishi(Japan) high quality 1600 grade fiber alumina
 Heating Element Silicon carbide (SiC)
 Thermocouple Type S
 Temperature Controller Shimadenfp93 (Japan) with 4 patterns and  40 segments
(i.e. 4 x 10 segments or 2 x 20 segments)
 Max Heating Rate 5°C (41°F)/min above 1200°C and 10°C (50°F)/min below 1200°C (2192°F)   
 Temperature Controller Precision +/- 1°C (+/- 1.8°F)
 Vacuum Sealing Flange Kit Stainless steel vacuum sealing flanges with one mechanical
vacuum gauge, two valves and four thermal ceramic blocks.  
 Electrical requirements 208-240VAC, 50/60 Hz, single phase
 Single-zone 1400°C max furnace detail specs Click for more info
 Download Product brochure

How to Program Across International Furnaces

Standard Package

Part description Quantity
Part image
 TF1400 one or two zones tube furnace1 pc
 Multi-channel gas supply system1 pc 
 Vacuum pump, exhaust filter and fittings (optional)1 pc 
 Stainless steel vacuum sealing flange set w/ pressure meter 1 set
 Alumina tube1 pc
 Flow meter1 pc
 Spare heating element2 pcs
 Stainless steel hook1 pc
 Alumina ceramic thermal block2 pairs
 Thermal gloves1 pair
 Spare fuse2 pcs
 USB/RS485 computer interface kit1 set
 Furnace and controller user’s manual2 pcs

Additional information

Weight600 lbs
Dimensions42 × 40 × 40 cm


There are no reviews yet.

Be the first to review “1400°C CVD Tube Furnace with Gas Mixing & Pumping System”

Your email address will not be published. Required fields are marked *