1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System



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SKU: STF1200cvd Categories: ,


STF1200 series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.






  • Compact, portable and lightweight design.
  • Lower processing temperatures required compare to conventional CVDs.
  • Film stress can be controlled by high/low frequency mixing techniques.
  • Split furnace chamber for fast and easy tube access.
  • Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
  • Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.
  • Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)
  • Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.
  • Built-in computer interface.
  • Long life type K thermocouple.
  • Slidable furnace option gives you ultra fast cooling rates


  • Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
  • Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.

Furnace, vacuum pump and gas mixing system specifications

Tube materialQuartz
Heating element Kanthal® (Sweden) A1 2.0 resistance coil wire
Max. vs constant working temperatures 1200°C max. and 1100°C constant
Thermo couple typeK
Refractory liningMitsubishi® (Japan) 1500 grade fiber alumina
Temperature controllerShimaden® (Japan) fp93 with 4 patterns and 40 segments
(ie. 4 x 10 segments or 2 x 20 segments)
Maximum heating rate < 30°C / min
Temperature controller precision
+/- 1°C (+/- 1.8°F)
Vacuum sealing flange kit Stainless steel vacuum sealing flanges with one vacuum gauge,
two valves and four thermal ceramic blocks.
Electrical requirements208-240VAC, 50/60 Hz, single phase
DownloadProduct brochure


RF generator specifications

Electrical requirements208-240 volts 50/60 Hz
Output power5 to 500 watts, adjustable in +/-1% step
RF frequency
13 MHz with +/-0.005% stability
Reflection power
200 watts max.
RF output port
50 Ω, N-type, female

How to Program Across International Furnaces


Standard Package


Part description






Part image


STF1200 split tube furnace1 set
Multi-channel gas supply system1 set
Plasma RF power supply (optional)1 set
Vacuum pump and enclosure (optional)1 set
Quartz tube1 pc
Analog flow meter1 pc
Stainless steel vacuum sealing flanges w/ pressure meter1 set
Stainless steel hook1 pc
Alumina ceramic thermal block2 pairs
Thermal gloves1 pair
Spare fuse2 pcs
USB/RS485 computer interface kit1 set
Furnace and Shimaden controller manual2 pcs

Additional information

Weight350 lbs
Dimensions42 × 26 × 25 cm


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